Design and Optimization of Interdigitated Microwave Sensor for Multidimensional Sensitive Characterization of Solid Materials

Abstract

This paper presents an interdigital capacitor (IDC)-based high sensitivity microwave sensor for the multidimensional (complex permittivity and thickness) characterization of solid materials. The proposed sensor was implemented by etching a slot resonator with an IDC on the ground layer of 0.76 mm-thick RF-35 substrate with relative permittivity of 3.5 and loss tangent of 0.0018. The IDC fingers were configured as a spur-line structure to create an intense electric field zone that interacted significantly with the material under test (MUT), resulting in high sensitivity. A sensor prototype with optimized dimensions generated dual resonant frequencies of 2.35 GHz and 5.79 GHz and was used to measure the MUT’s complex permittivity and thickness, respectively. Experimental results revealed that the resonant frequencies of the developed sensor exhibited high sensitivities (276 MHz/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\varepsilon _{r}$ </tex-math></inline-formula> for permittivity and 143 MHz/mm for thickness) and resolutions (0.27678 for permittivity and 0.1439 for thickness) of solid materials. Moreover, the sensing accuracies were 99.9% for real permittivity and 97.7% for imaginary permittivity. The demonstrated high performance of the developed sensor validates its applications in the multidimensional characterization of various solid materials.