Abstract
Abstract. Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested in this paper. It is fully symmetrical along with the x- and y-directions. For obtaining large output displacements, two fully symmetric two-stage lever displacement amplifiers are utilized to amplify output displacements of piezoelectric actuators (PZTs). The established models for performances evaluation of the stage, in terms of kinetostatics, amplification ratio, reachable workspace, the input and output stiffness, are verified by finite element analysis (FEA). After that, the dimensional optimization is also carried out through the genetic optimization algorithm.The prototype of the mechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM) process. Testing results indicate that the proposed micromanipulator demonstrates good performance.
Highlights
Flexible hinge, which possesses these advantages of no backlash, no friction, simple structure, and easy manufacture, is widely applied in the micromanipulation system including micro/nano-positioning stages, micromanipulators, and high-accuracy alignment instruments (Tian et al, 2009)
Micromanipulation system has been paid more and more attention in recent years, especially the parallel compliant mechanisms own some inherent advantages as big load capacity, high velocity, and high precision compared with serial ones (Dong et al, 2016)
For a 2-DOF motion platform, supposing that the ARm is denoted as the amplification ratio of the mechanism and S is looked as the stroke of the Piezoelectric actuators (PZTs) actuator, the workspace of the micromanipulation stage is represented by ARmS × ARmS
Summary
Flexible hinge, which possesses these advantages of no backlash, no friction, simple structure, and easy manufacture, is widely applied in the micromanipulation system including micro/nano-positioning stages, micromanipulators, and high-accuracy alignment instruments (Tian et al, 2009). Lin and Lin (2012) have designed a series of xy compliant mechanisms with the maximal cross coupling error of 0.12 μm and the frequency of 50 Hz. Polit and Dong (2011) have proposed a high-bandwidth xy positioning stage with the cross coupling motion of 0.2 % at the total workspace of 15 μm × 15 μm in two directions. Based on the aforementioned analyses, the micromanipulation stage is proposed in this paper with low cross coupling, large reachable workspace, high stiffness and high bandwidth It aims to improve the positioning precision of micromanipulator. The main contribution of this paper is described as follows: (a) the structural design, kinematics and statics modeling analysis, and prototype test of this novel mechanism; (b) the lower cross coupling errors with larger workspace compared with other papers.
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