Design and optimization of a novel resonant accelerometer resonator

Abstract

MEMS resonant accelerometer has been proved to be a delicate accelerometer with high performance. Mechanical resonator is the core component for the design of MEMS resonant accelerometer. With the development of surface micro-machining and bulk micro-machining technology, the silicon resonator has expanded its use to micro-accelerometers. Two resonator structures of non-fork-ends-extension and fork-ends-extension with four kinds of key component structure electronic parameters are designed. The resonator consists of two DETF tuning forks fixed by two anchors; the fixed and movable combs and the necessary attachable structure such as convex table-board. FEA (finite element analysis) method was used to simulate the working condition with the consideration of the silicon micro machining property and feasibility. It reveals that the novel resonate accelerometer is characterized of high sensitivity through theoretical analysis and simulation on entire structure.