Design and Numerical Simulation of a Novel High-Speed Multi-Degrees of Freedom Piezoelectric positioner

Abstract

ABSTRACT In this report, the design and numerical analysis of a novel multi-degree of freedom micropositioner driven by piezoelectric stacks actuator were studied. This flexure based positioning mechanism with sensors permits the high-speed translational movement along the X- Y- and Z axes, and rotation about the ZR-axis. This design aims at high stiffness, high precision, and elimination of cross-coupling errors. The modeling and numerical simulation of this device at different actuation voltage were performed to understand the behavior and effects of the applied load on the structure. Furthermore, modal analysis was conducted to determine the resonance frequency in various axes under consideration. Lastly, cross-coupling analysis was carried out to eliminate geometric non-linearity effects. The ability of this device to incorporate the basic robotic motions highlights its significance in dexterous and high-resolution applications especially in micromanipulation and atomic force microscope.