Abstract
A single-loop fourth-order sigma–delta (σ Δ) interface circuit for a closed-loop micromachined accelerometer is presented. Two additional electronic integrators are cascaded with the micromachined sensing element to form a fourth-order loop filter. The three main noise sources affecting the overall system resolution of a σ Δ accelerometer, mechanical noise, electronic noise and quantization noise, are analyzed in detail. Accurate mathematical formulas for electronic and quantization noise are established. The ASIC is fabricated in a 0.5 μm two-metal two-poly n-well CMOS process. The test results indicate that the mechanical noise and electronic noise are 1 μg/√Hz and 8 μV/√Hz respectively, and the theoretical models of electronic and quantization noise agree well with the test and simulation results.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
