Abstract
As the need to develop high-performance highly accurate positioning has grown in a wide range of industries, it has become necessary to comprehensively study desirable stage positioning systems based on new design concepts. Achieving nanometer positioning requires simultaneous noncontact drive and support of the moving stage. We developed a linear motordriven stage positioning system with squeeze bearings and evaluated squeeze bearing and positioning performance of the proposed positioning system through a series of actual stage driving experiments that confirmed the stage's nanopositioning capability.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
