Abstract

This paper discusses about nano particle-based gas sensors to study the different parameters like power consumption, temperature uniformity, change in resistance, sensitivity, and selectivity. These all are estimated by measuring resistance changes as gas is spread over the surface layer. The instant response of gas detection uses in different applications like vehicle breath analyser and food quality control. The sensor is made up of with poly silicon hot plate structure and it is coated with titanium file, which detects various gases touching on it.The temperature of hot plate changes the film conductance and amount of gas absorbed on its surface. The gas sensor is configured with 3V supply voltage and micro heater temperature around 619 K. The gas is sensed by the sensor is analysed for different materials coating like ZnO, TiO2 and SnO.

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