DESIGN AND MODELING OF THERMALLY ACTUATED MICROMIRROR FOR FINE-TRACKING MECHANISM OF HIGH-DENSITY OPTICAL DATA STORAGE

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 413-416 (2003) Design, Modelling and SimulationNo AccessDESIGN AND MODELING OF THERMALLY ACTUATED MICROMIRROR FOR FINE-TRACKING MECHANISM OF HIGH-DENSITY OPTICAL DATA STORAGEXIAOCHONG DENG, JIAPING YANG, and TOW CHONG CHONGXIAOCHONG DENGData Storage Institute, A*STAR, DSI Building 5 Engineering Drive 1, Singapore 117608, SingaporeElectrical and Computer Engineering Department, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore Search for more papers by this author , JIAPING YANGData Storage Institute, A*STAR, DSI Building 5 Engineering Drive 1, Singapore 117608, Singapore Search for more papers by this author , and TOW CHONG CHONGData Storage Institute, A*STAR, DSI Building 5 Engineering Drive 1, Singapore 117608, SingaporeElectrical and Computer Engineering Department, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore Search for more papers by this author https://doi.org/10.1142/S146587630300140XCited by:1 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractElectro-thermal actuations are very attractive since they can generate larger deflections and forces with low actuating voltages and their fabrication process is compatible with general IC fabrication process. In this paper, a novel micromirror actuated by four thermal bi-layer cantilevers is proposed as a fine-tracking device for high-density optical data storage. Each bi-layer cantilever comprises two material layers with different coefficients of thermal expansion. Due to bimorph effect, the cantilevers bend upwards and downwards an integrated micromirror in the out-of-plane direction. In the modeling of the thermal bi-layer cantilevers, mathematical models are built for both electro-thermal and thermal-mechanical analyses. Furthermore, finite element analysis is performed to evaluate the transient responses and thermal deformations under the actuating voltage and current. The simulation results show that the micromirror can be easily actuated more than 1.5 μm under 1 kHz 4v AC and the first mode resonance frequency is above 18 kHz. Finally, a fabrication process flow of the thermally actuated micromirror (TAM) is proposed. The proposed MEMS device also offers the potential for applications in adaptive optics systems and other optical systems.Keywords:Thermal actuatorMicromirrorOptical data storage References H. Hirano, L.-S. Fan, T. Semba, W. Y. Lee, J. Hong, Micro actuator for tera-storage, Proceedings of MEMS'99, Orlando, FL (Jan, 1999) 441-446 . Google Scholar P. N. Minh, T. Ono, M. Esashi, A novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy, Proceedings of MEMS'99, Orlando, FL (Jan, 1990) 360-365 . Google ScholarL. P. Ghislainet al., Appl. Phys. Lett. 74(4), 501 (1999). Crossref, Google ScholarY. Yeeet al., Sensors and Actuators A 89, 166 (2001). Crossref, Google ScholarW. Chu, M. Mehregany and R. L. Mullen, J. Micromech. Microeng. 3, 4 (1993). Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 1A self-sensing thermal actuator incorporating micromirror for tracking mechanism of optical driveJ.P. Yang, X.C. Deng and T.C. Chong Recommended Vol. 04, No. 02 Metrics History KeywordsThermal actuatorMicromirrorOptical data storagePDF download