Abstract
Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types. Optical fibers were employed in most previous generations, making micro-fabrication problematic. The optical accelerometers that are suitable for mass manufacture and previously mentioned in the literature have various problems and are only sensitive in one direction (1D). This study presents a novel optical accelerometer that provides 3D measurements while maintaining simple hybrid fabrication compatible with mass production. The operating concept is based on a power change method that allows for measurements without the need for complex digital signal processing (DSP). Springs hold the proof mass between a light-emitting diode and a quadrant photo-detector, allowing the proof mass to move along three axes. Depending on the magnitude and direction of the acceleration affecting the system, the proof mass moves by a certain amount in the corresponding axis, causing some quadrants of the quadrant detector to receive more light than other quadrants. This article covers the design, implementation, mechanical simulation, and optical modeling of the accelerometer. Several designs have been presented and compared. The best simulated mechanical sensitivity reaches 3.7 μm/G, while the calculated overall sensitivity and resolution of the chosen accelerometer is up to 156 μA/G and 56.2 μG, respectively.
Highlights
Almost all smart machines nowadays contain an accelerometer, including electronics, automotive, naval transportation, airplanes, robotics and prosthetic devices
The V-shaped mirror is connected to a proof mass, when the proof mass moves under acceleration the differential light signal read by the two detectors will change and acceleration can be sensed
Fabrication of the mechanical part of the proposed accelerometers can be done on silicon on insulator (SOI) wafer, and only requires two masks, a structure layer mask, and a back etching mask
Summary
Almost all smart machines nowadays contain an accelerometer, including electronics, automotive, naval transportation, airplanes, robotics and prosthetic devices. Upon displacement of the proof mass because of acceleration the nanocavity dimension changes, which makes a shift in the optical resonance frequency This device achieved about 10 μg resolution at 1 Hz movement [16]. The V-shaped mirror is connected to a proof mass, when the proof mass moves under acceleration the differential light signal read by the two detectors will change and acceleration can be sensed This device may achieve 78 mG resolution [18]. When the proof mass moves under the acceleration effect, the intensity of light reaching the QPD through the proof mass slit will change The resolution of this device was down to. This paper proposes an optical tri-axial accelerometer based on the optical power change that shows a high resolution and sensitivity while maintaining easy fabrication, simple assembly and small size. It shows finite element analysis (FEA) COMSOL simulation for the main mechanical parameters, MATLAB modelling of optical parameters and total sensitivity
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