Abstract

In this study, we have used arrays of piezoresistive nanomechanical membrane resonators (NMRs) to detect IgG1 antibody. The NMR consists of a membrane suspended by four piezoresistive sensing components. Unlike conventional cantilever mass sensors, our sensors retain a uniform mass sensitivity over the membrane surface. According to the experiments, it was revealed that NMRs have mass sensitivities in the order of 25 Hz/pg in air and 1.8 Hz/pg in liquid. This matter allows them to detect IgG1 over a wide range of concentrations from 100 pg/mL to 10 μg/mL in a background of human serum albumin (HSA) at 1 mg/ml. This indicates the fact that the self-sensing NMR approach is beneficial for detecting disease markers. Moreover, the performance of the NMR was compared with other detection methods, and the results indicated a better performance for NMR.

Highlights

  • The development of clinical sensors and biosensors has increased in recent years, improvements in sensitivity, selectivity, limits of detection, fast response, and miniaturization are yet to be attained

  • In comparison with the standard piezoresistive cantilever, this study demonstrated a factor of more than 20 times higher sensitivity than that obtained with a standard piezoresistive cantilever

  • A release window was photolithographically defined by the fourth lithographic process, and the exposed buried oxide (BOX) was etched by reactive-ion etching (RIE), leaving the silicon substrate exposed

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Summary

Introduction

The development of clinical sensors and biosensors has increased in recent years, improvements in sensitivity, selectivity, limits of detection, fast response, and miniaturization are yet to be attained. A sensitive readout system is crucial for monitoring the deflection of cantilevers For this reason several readout methods have been presented. The optical method is simple to implement and shows a linear response with subangstrom resolution and is currently the most sensitive method. This method is employed for detecting the cantilever deflection in most studies [5,6,7,8]. The optical-detection mechanism presents some disadvantages, for example, bulky, time-consuming laser alignment on each cantilever and low applicability for large one- or two-dimensional arrays, and the difficulty of performing measurements in opaque liquids, such as blood, may hinder the potential application of this method for actual applications

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