Abstract
In this study, we have used arrays of piezoresistive nanomechanical membrane resonators (NMRs) to detect IgG1 antibody. The NMR consists of a membrane suspended by four piezoresistive sensing components. Unlike conventional cantilever mass sensors, our sensors retain a uniform mass sensitivity over the membrane surface. According to the experiments, it was revealed that NMRs have mass sensitivities in the order of 25 Hz/pg in air and 1.8 Hz/pg in liquid. This matter allows them to detect IgG1 over a wide range of concentrations from 100 pg/mL to 10 μg/mL in a background of human serum albumin (HSA) at 1 mg/ml. This indicates the fact that the self-sensing NMR approach is beneficial for detecting disease markers. Moreover, the performance of the NMR was compared with other detection methods, and the results indicated a better performance for NMR.
Highlights
The development of clinical sensors and biosensors has increased in recent years, improvements in sensitivity, selectivity, limits of detection, fast response, and miniaturization are yet to be attained
In comparison with the standard piezoresistive cantilever, this study demonstrated a factor of more than 20 times higher sensitivity than that obtained with a standard piezoresistive cantilever
A release window was photolithographically defined by the fourth lithographic process, and the exposed buried oxide (BOX) was etched by reactive-ion etching (RIE), leaving the silicon substrate exposed
Summary
The development of clinical sensors and biosensors has increased in recent years, improvements in sensitivity, selectivity, limits of detection, fast response, and miniaturization are yet to be attained. A sensitive readout system is crucial for monitoring the deflection of cantilevers For this reason several readout methods have been presented. The optical method is simple to implement and shows a linear response with subangstrom resolution and is currently the most sensitive method. This method is employed for detecting the cantilever deflection in most studies [5,6,7,8]. The optical-detection mechanism presents some disadvantages, for example, bulky, time-consuming laser alignment on each cantilever and low applicability for large one- or two-dimensional arrays, and the difficulty of performing measurements in opaque liquids, such as blood, may hinder the potential application of this method for actual applications
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