Abstract
Surface acoustic wave (SAW) sensors have garnered significant attention due to high performance in gas detection. Love wave as the special mode of SAW has greater attractiveness for molecules detection in gas or liquid. To investigate the detection performance of Love wave SAW (Love-SAW) devices towards toxic gases, the influence of interdigitated electrodes on the propagating performance of Rayleigh and shear horizontal (SH) waves along ST-X and ST-90°X quartz substrates was analyzed by finite element method (FEM). The effect of the guiding layer based on different substrates of SAW devices has been discussed by changing the thickness of the zinc oxide (ZnO) layer. The results indicate that the SH wave excited on ST-90°X quartz substrate couples into the Love wave mode through the ZnO guiding layer, and Rayleigh waves in ST-X quartz do not exhibit mode coupling. The Love-SAW sensor covering the ZnO guiding layer (0.5 µm) has shown high mass sensitivity. The vibration distribution of SH wave excited by different thicknesses of electrodes is different, indicating that the mass-loading is one of the reasons for the transformation of SH wave into Love wave. Furthermore, the 50 ppm, 95 ppm and 110 formaldehyde-load leads the short-circuit resonance frequency of the polyetherimide (PEI) covered Love-SAW devices to drop by 100.1 kHz, 200.2 kHz and 300.3 kHz, respectively. The maximum detection sensitivity reached about 2.73 kHz/ppm. This work can provide valuable insights for designing and investigating the SAW formaldehyde gas sensors.
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