Abstract
With the aim of detecting the attitude of a rotating carrier, the paper presents a novel, digital angular rate sensor. The sensor consists of micro-sensing elements (gyroscope and accelerometer), signal processing circuit and micro-processor (DSP2812). The sensor has the feature of detecting three angular rates of a rotating carrier at the same time. The key techniques of the sensor, including sensing construction, sensing principles, and signal processing circuit design are presented. The test results show that the sensor can sense rolling, pitch and yaw angular rate at the same time and the measurement error of yaw (or pitch) angular rate and rolling rate of the rotating carrier is less than 0.5%.
Highlights
In recent years, MEMS sensors have become more and more popular in the industrial and automotive fields
From the function (2), it is clear that the virtual value of output voltage is directly proportional to the synthesis of angular rate Ω of rotating carrier between yaw and pitch
In order to obtain yaw and pitch angular rate, an accelerometer is used, which is attached to the rotating carrier
Summary
MEMS sensors have become more and more popular in the industrial and automotive fields. There are many micromechanical gyroscopes (angular rate sensors), including electrostatically driven [3,4], electromagnetic driven [5,6,7] and Sensors 2010, 10 piezoelectric driven [8,9] ones, etc., designed to measure the angular rate or the rotation angle by integrating the measured angular rate with respect to time. We are investigating a novel MEMS-based gyroscope, which has no driving parts, and utilizes the circumrotation of the rotating carrier itself as driving force It is suitable for detecting the angular rate of a rotating carrier due to its characteristics. The digital angular rate sensor can sense three angular rates of a rotating carrier and output three digital angular rate signals
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