Design and Fluid Structure Interaction Analysis of a Micro-Channel as Fluid Sensor

Abstract

In this proposed work, the design and analysis of a flow sensor to be integrated into a micro-channel is presented. A finite element analysis is carried out to simulate fluid-structure interaction and estimate cantilever deflection under different fluidic flows at constant flow rate. The design of device is based on the determination of geometrical dimensions. A mathematical analysis describing the fluid mechanics and their interaction with the beam is also proposed. The mathematical model is done using finite-element analysis, and a complete formulation for design analysis is determined. Finite element method based Comsol Multiphysics simulations are used to optimize the design in order to determine the fluid velocities after interaction with the free end of the micro-cantilever beam. The device is successfully designed for sensing different fluids.