Abstract

The design technique, fabrication, and breakdown-test results are described of a low-loss SAW (surface acoustic wave) filter for use in mobile telephone equipment. A multitransducer structure was adopted to get a low-loss SAW filter composed of 13 transducers (seven unapodized and six withdrawal) formed on a 36 degrees YX-LiTaO/sub 3/ substrate. As a result, the pass band loss was from 1.8 dB to 2.2 dB. Because the filter was for use in the UHF band (800 MHz band), the fingers of each transducer were required to be of a hyperfine line width. To form such a transducer on the substrate, it is useful to use lift-off technology using deep-UV exposure.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

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