Abstract
In this paper, we propose a synthetic jet-type micropump for supplying air. Synthetic jet actuators usually include a small single pumping cavity, inlet/outlet channels, and a Lead zirconate titanate(PZT) membrane that exerts the pumping pressure. To determine the optimum design parameters of the air pump, a numerical analysis was carried out by varying its geometry. The optimized air pump was fabricated by replicating PDMS parts from silicon masters patterned by the deep RIE process. The size of the fabricated micropump was 16 × 13 × 3 mm3. In order to control the frequency of the PZT membrane and reduce the controller size and power consumption, an SP4423 microchip was used. At a pumping frequency of 80 Hz, a flow rate of 9.5 cc/min, pumping pressure of 438 Pa, and power consumption less than 0.15 mW were achieved.
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