Abstract
This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.
Highlights
Bone strains are vital factors for osteogenic responses [1]
A flexible strain sensor was designed and fabricated based on the piezoresistive effect of single-walled carbon nanonets (SWCNNs), and Parylene-C was used as the waterproof layer for ensuring biocompatibility
After the micro-fabrication, the device with thermal release tape is placed on the hot plate, and the presented strain sensor is released from the thermal release tape by heating for 1 min at 120 °C
Summary
Bone strains are vital factors for osteogenic responses [1]. A complete understanding of the biomechanical behavior of human bone under daily activity conditions is crucial for the development of post-surgical therapies, which must be adapted to the healing stage [2]. In vivo bone strain measurement through an implantable sensor is one of the most suitable solutions for these requirements [4]. The large pattern of metallic foil gauges presents difficulty in implantable surgery and causes patient discomfort Because of their reversible electromechanical [5,6] and biocompatible [7] characteristics, carbon nanotubes (CNTs) are excellent for bone strain gauges, in which the strain would be measured by recognizing electrical resistance changes [8,9,10,11,12,13,14,15]. A flexible strain sensor was designed and fabricated based on the piezoresistive effect of single-walled carbon nanonets (SWCNNs), and Parylene-C was used as the waterproof layer for ensuring biocompatibility
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