Abstract
Commercial markets desire integrated multifrequency band-select duplexer and diplexer filters with a wide fractional bandwidth and steep roll-off to satisfy the ever-increasing demand for spectrum. In this paper, we discuss the fabrication and design of lithium niobate (LN) thin-film S0 Lamb-wave resonators on a piezoelectric-on-piezoelectric platform. Filters using these resonators have the potential to fulfill all the above requirements. In particular, we demonstrated one-port high-order S0 Lamb-wave resonators with resonant frequencies from $\sim 400$ MHz to $\sim 1$ GHz on a black rotated y-136 cut LN thin film. The effective electromechanical coupling factor ( $k_{eff}^{2}$ ) ranges from 7% to 12%, while the measured quality factor ranges from 600 to 3300. The highest $k_{eff}^{2} \times Q$ achieved on this chip is 194, significantly surpassing contour mode resonators manufactured in other technologies. [2014-0280]
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