Design and Fabrication of Quartz MEMS Based Double-ended Tuning Fork Resonator

Abstract

This paper presents the design and fabrication of double-ended tuning fork (DETF) resonator based on quartz. DETF resonator was designed with two tines structure, due to this configuration has the advantage of providing dynamic balance. Both surface and side electrode were designed on DETF tines in order to enhance the piezoelectric effect. DETF resonator was fabricated from a quartz substrate by chemical wet etching and photolithography processes, the key feature of fabrication is to create Cr/Au metal films, which should be strong enough to withstand the aggressive quartz etchant, meanwhile, the wet etching parameters was optimized in order to reduce the sidewall structure in +X orientation which can greatly deteriorate vibrating characteristics of DETF tines. Experimental results demonstrated that the Q value would be lowered and motional resistance be increased with the force sensitivity increase of DETF tines.