Abstract
As the core component of the adaptive optics system, the deformable mirror is developing towards miniaturization and integration through the combination of MEMS technology. In this paper, based on the inverse piezoelectric effect of piezoelectric materials, a piezoelectrically driven deformable reflective micromirror is designed and fabricated by physical vapor deposition, UV lithography, eutectic bonding, mechanical cutting, deep reactive ion etching (RIE) and other processes to complete the preparation of micromirrors. The problems related to the eutectic bonding process of PZT and Si in the fabrication of micromirrors are emphatically studied through tensile experiments. The micromirror was tested with a laser interferometer. The test results showed that the prepared micromirror could achieve a maximum deformation of 0.6 μm in the positive direction and 1.7 μm in the negative direction when a voltage of ±1.5 kV was applied.
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