Abstract

In this paper, thin films of undoped and nickel oxide (NiO) doped titanium dioxide (TiO2) were prepared using the chemical spray pyrolysis deposition (CSP) technique, with different concentrations of nickel oxide (NiO) in the range (3-9) wt%. The morphological, structural, electrical, and sensing properties of a gas of the prepared thin films were examined. XRD measurements showed that TiO2 films have a polycrystalline structure. AFM analysis showed that these films have a regular structure both before and after doping . The roughness of these films decreased after adding impurities but then the opposite of that took place. The electrical and gas sensing properties of titanium dioxide was also affected after doping. The highest sensitivity value was obtained at doping concentration of 5wt% and working temperature 473ºK.

Highlights

  • IntroductionAl-Taa'y and Hasan Iraqi Journal of Science, 2021, Vol., No.11(Special Issue), pp: 4385-4396 oxides (SMO) have been applied to solid state gas sensors

  • Due to their low cost, ease of manufacture and use, flexibility in detecting a wide variety of toxic / flammable gases, and durability in harsh environments, semiconducting metalAl-Taa'y and Hasan Iraqi Journal of Science, 2021, Vol.62, No.11(Special Issue), pp: 4385-4396 oxides (SMO) have been applied to solid state gas sensors

  • Polycrystalline structure of TiO2, undoped and doped with nickel oxide (NiO) up to 9wt%, was obtained using chemical spray pyrolysis technique subjected to annealing at 600oC for one hour

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Summary

Introduction

Al-Taa'y and Hasan Iraqi Journal of Science, 2021, Vol., No.11(Special Issue), pp: 4385-4396 oxides (SMO) have been applied to solid state gas sensors. These sensors depend on reversible changes in electrical conductivity of gas molecules to be adsorbed/ desorbed on their surfaces [1]. Titanium dioxide (TiO2) is one of the most common semiconductor metal oxides for the production of conductometric gas sensors, due to its non-toxic nature, chemical stability, and commercial availability at low cost, robust, and general reactivity [2,3]. Structural, morphological and electrical properties for TiO2 pure and doped with NiO were measured and determined to prepare a gas sensor device for NO2 gas sensitivity measurement

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