Design and fabrication of multi-metal patterned target anodes for improved quality of hyperspectral x-ray radiography and computed tomography imaging systems

Abstract

Applications such as counterfeit identification, quality control, and non-destructive material identification benefit from improved spatial and compositional analysis. X-ray Computed Tomography is used in these applications but is limited by the X-ray focal spot size and the lack of energy-resolved data. Recently developed hyperspectral X-ray detectors estimate photon energy, which enables composition analysis but lacks spatial resolution. Moving beyond bulk homogeneous transmission anodes toward multi-metal patterned anodes enables improvements in spatial resolution and signal-to-noise ratios in these hyperspectral X-ray imaging systems. We aim to design and fabricate transmission anodes that facilitate confirmation of previous simulation results. These anodes are fabricated on diamond substrates with conventional photolithography and metal deposition processes. The final transmission anode design consists of a cluster of three disjoint metal bumps selected from molybdenum, silver, samarium, tungsten, and gold. These metals are chosen for their k-lines, which are positioned within distinct energy intervals of interest and are readily available in standard clean rooms. The diamond substrate is chosen for its high thermal conductivity and high transmittance of X-rays. The feature size of the metal bumps is chosen such that the cluster is smaller than the 100 µm diameter of the impinging electron beam in the X-ray tube. This effectively shrinks the X-ray focal spot in the selected energy bands. Once fabricated, our transmission anode is packaged in a stainless-steel holder that can be retrofitted into our existing X-ray tube. Innovations in anode design enable an inexpensive and simple method to improve existing X-ray imaging systems.