Abstract
This paper describes the fabrication of a miniaturized magnetostrictive delay line thin film. A monolithic design has been achieved with the coils and the magnetoelastic element contained onto the same silicon substrate. Such a miniaturized device able to be used as a sensor was fabricated by using a multilayer-like technique. The exciting conductor, the receiving coil and the magnetostrictive delay line were fabricated using a conventional photolithographic technique. In order to use conventional magnetostrictive thin films and Fe-metalloid amorphous thin films as active-magnetoelastic elements, the magnetoelastic properties which determine their performance was studied.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.