Abstract
This paper presents a design and microfabrication of microchannels in virtual impactor using multilayer dry film photoresist.8 layers Riston® RSD200 series dry film photoresist were used in this study to realize microfluidic channel with thickness of 400µm.Virtual impactor with total size of 15×20mm is realized. The lateral feature size of the channel is 100µm. The measurement results show that the channel sidewall angle is 127° invertical, which is good enough for forming the air flow path.
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