Abstract
This paper presents a novel micro-electromechanical systems (MEMS) FP tunable filter with a FP cavity independent of electro-static actuator, which is fabricated by the bulk micromachining processes. The electro-static actuator based on the parallel-plate capacitive actuation is separated with the FP cavity, and it can be designed without the limits to fabricate the FP cavity. The compatible MEMS fabrication processes with micromirror and FP cavity is proposed, in which the optical micromirror is fabricated with an average surface roughness (Ra) less than 6nm. The experimental results show that the fabricated FP tunable filter can be tuned 40nm with a driving voltage from 0V to 15V, its 3dB bandwidth is 0.4nm and the single mode fiber coupling loss is less than −3.7dB.
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