Design and fabrication of high-Q silicon micro-resonators

Abstract

We design and fabricate two different high-Q micro-resonators in a silicon-on-insulator (SOI) platform. Two device architectures are non-concentric microring resonator (MRR) and microdisk resonator (MDR) with ridge wave-guide. Theoretical analysis and experimental demonstration show that intrinsic power losses per round-trip can be decreased, thus improving the Q-factor. The highest Q-factor can be achieved at 8×104 and 1.9×105, respectively.