Abstract
DC type ion beam is produced by using different percentages of argon gas content. In this manner, about 90% of argon gas was ionized, and the ion beam diameter is controllable by the extractor in 10−3torr. The density of charged particles was measured by Faraday cup. In this paper, some recent findings are presented dealing with the analysis of the production of ion beam with different energy levels. Result of measurements compare with that of other sources.
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