Abstract
A synchrotron radiation soft x-ray beamline for scanning microscopy mainly, is being constructed in Hefei. It contains a linear monochromator consisting of a diaphragm of 7 μm diameter and one of three condenser zone plates (CZP). The three CZPs are for three overlapping wavelength ranges 1.97–2.78 nm (CZP23), 2.74–3.87 nm (CZP32), and 3.84–5.44 nm (CZP45), respectively. The processing steps for the condenser zone plate fabrication are summarized, especially the holographic exposure with a special optical system as a key step. Parameters of a prototype of CZP45 fabricated in Hefei are the following: D=2.9 mm, n=826, R1=0.05 mm, and ΔRn≊0.9 μm.
Published Version
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