Abstract
Si-based double-layer overlapping open microchannels have been designed and fabricated for microfluidic applications. The top channel has been ingeniously designed in both T-shaped and X-shaped configurations along the <100> direction, while the bottom channel has been prepared along the <110> direction, allowing it to be semi-buried into the top channel at a 45-degree angle. An undercut characteristic of 25% TMAH has been utilized to create a unique overlapping microchannel structure by removing material from the overlapping part of the two layers of channels. This results in intersecting microchannels that are not connected, providing significant structural advantages over traditional single-layer microchannels. With this innovative design, two different substances can be delivered independently and efficiently in the same area.
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