Abstract
A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator’s working principle and magnetic circuit were analyzed. The calculation results show that the actuator’s output torque is decisive to the air gap’s magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°).
Highlights
Optical fiber has many advantages compared with electric cables, such as high bandwidth, low loss, a compact size, immunity to electromagnetic interference, and large capacity [1,2,3]
The microelectromechanical systems system (MEMS) optical switch is an important member of optomechanical switches
Compared to other optomechanical switches, a MEMS optical switch has advantages of a compact size, fast switch speed, low insertion loss, low crosstalk, and polarization sensitivity, and it is considered the mainstream in large-capacity switched optical networks [4,6]
Summary
Optical fiber has many advantages compared with electric cables, such as high bandwidth, low loss, a compact size, immunity to electromagnetic interference, and large capacity [1,2,3]. Electromagnetic driving has the merits of a large driving force, higher This actuator has an axial magnetic flux structure with multiple windings and magnetic efficiency and longer operation lifetime, and large output displacement. Poles.InIt this haspaper, the advantages of a large output torque, fast response, a compact size, and a novel swing-type actuator is proposed for optical switches. This position actuator has an axial magnetic flux structure with multiple windings and magnetic poles. It has the advantages of a large output torque, fast response, a compact size, and.
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