Abstract

In this paper, a micro spatial light modulator (SLM) for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology. In the fields of adaptive optics and pattern recognition system, SLM is used to modulate the phase and amplitude of incident light in order to correct aberration in an optical system through active control of mirror array. An Al micro SLM, which can modulate phase or amplitude of an incident light simultaneously, is designed and fabricated. In order to maximize the fill factor, a hidden spring structure is used and in order to lower driving voltage, a double crab leg type spring is used.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.