Abstract
The traditional handmade catalytic combustion gas sensor has some problems such as a pairing difficulty, poor consistency, high power consumption, and not being interchangeable. To address these issues, integrated double catalytic combustion of alcohol gas sensor was designed and manufactured using silicon micro-electro-mechanical systems (MEMS) technology. The temperature field of the sensor is analyzed using the ANSYS finite element analysis method. In this work, the silicon oxide-PECVD-oxidation technique is used to manufacture a SiO2-Si3N2-SiO2 microstructure carrier with a sandwich structure, while wet etching silicon is used to form a beam structure to reduce the heat consumption. Thin-film technology is adopted to manufacture the platinum-film sensitive resistance. Nano Al2O3-ZrO-ThO is coated to format the sensor carrier, and the sensitive unit is dipped in a Pt-Pd catalyst solution to form the catalytic sensitive bridge arm. Meanwhile the uncoated catalyst carrier is considered as the reference unit, realizing an integrated chip based on a micro double bridge and forming sensors. The lines of the Pt thin-film resistance have been observed with an electronic microscope. The compensation of the sensitive material carriers and compensation materials have been analyzed using an energy spectrum. The results show that the alcohol sensor can detect a volume fraction between 0 and 4,500 × 10−6 and has good linear output characteristic. The temperature ranges from −20 to +40 °C. The humidity ranges from 30% to 85% RH. The zero output of the sensor is less than ±2.0% FS. The power consumption is ≤0.2 W, and both the response and recovery time are approximately 20 s.
Highlights
The sensor is the front-end and key component to acquire information in modern information systems, and its performance is directly related to the quality of the information system’s perception of external data [1]
This catalytic combustion gas sensor comprises of sensitive and reference cells that are integrated on a chip, and it is composed of two isolation bridge beams
A specific dynamic test system for gas sensors is used in conjunction with the standard gas dilution device to produce a volume fraction (0~10,000) of X10-6 standard ethanol gas
Summary
The sensor is the front-end and key component to acquire information in modern information systems, and its performance is directly related to the quality of the information system’s perception of external data [1]. The design and manufacture of the sensor are key to any information technology research. The design of gas sensors is difficult because the sensitive body must come into contact with the atmospheric environment [2]. For the detection of a certain gas, we can use either of the photoelectric principles, i.e., the electrochemical or catalytic combustion method, to design the semiconductor [3]. For combustible gas, the catalytic combustion sensor has a higher sensitivity and faster recovery response when compared with others. The manufacturing technology is simple and inexpensive, which results in the largest output and a wider range of applications
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