Abstract

An echelle polychromator for inductively coupled plasma optical emission spectroscopy (ICP-OE9) was designed for use with the multichannel solid- state detector described in the companion article. The optical system has separate output sections for the UV and visible wavelength ranges, which permit high spectral resolution and high optical throughput nahile covering the spectral range from 167 to 782 nm. A novel component in the UV section corrects spherical aberration, cross-disperses the spectrum, and separates the UV and risible beams. A large-area echelle grating has been ruled for this system which has high diffraction efficiency and constant blaze angle across the spectrum and low stray light

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