Abstract
This paper presents the design and evaluation of a high-bandwidth fast steering mirror (FSM) driven by a piezoelectric actuator (PEA) for applications in the scanning systems. To avoid additional dynamics induced by flexure hinges and to simplify the structure of the FSM, a preload force mechanism based on permanent magnets (PMs) is proposed. Actuators and sensors that can satisfy the required flatness and bandwidth are chosen, and the designs of the mirror and the preload force mechanism are completed with the aid of finite element analysis. A simple system model and controller design are achieved by analyzing the voltage transformation and the relationships between different displacements. To verify the feasibility of the design and evaluate the performance of the FSM, a series of experiments was carried out with voltage control, charge control, and charge plus notch filter control. The final experimental results show that the FSM reaches a high bandwidth of 8 kHz with charge plus notch filter control, demonstrating that design of an FSM with a PM preload force mechanism is feasible.
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