Abstract
Electro-thermal analysis of a new micro-hotplate designed for gas sensor has been studied in this paper. Through the comparison of materials, select pt as electrodes material, Si, SiO2 as substrate materials. Then, through the optimization of substrate structure, in order to make the gas sensor obtain perfect properties of good temperature uniformity, the thickness of Si substrate, thermal insulation layers are 150, 50, 100 µm respectively. The new micro-hotplate structure is benefit for the improvement of sensitivity and overall performance of the sensor.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
