Abstract
In this paper, methods of micro-fabrication carried out by micro milling machine are proposed. Structure design and simulation analysis of micro milling machine are accomplished. A 3D parametric modeling software CATIA is used to complete the structure design and modeling of micro milling machine and a simulation software ANSYS is used to do the whole analysis of micro milling machine. The static and dynamic simulation analysis of motorized spindle which is the key part of micro milling machine is also completed. Through simulation and analysis to seek the rationality of the design of micro milling machine. It has important significance for the improvement and development of machine tool in the next step.
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