Abstract
Capacitive devices have received much attention for large-scale strain sensors in recent years. In this paper, the design and fabrication of an MEMS-based capacitive large-scale strain sensor using alumina as the plate is presented for the large crack monitoring application. A change in strain causes a measurable change in the capacitance of the sensor by the relative shift of the overlap area between two capacitive plates, which was converted into the voltage signal. The measured large-scale strain range in this work is between 0 and 0.2 ϵ, and the experimental results showed an outstanding large-scale strain sensing ability of the sensor, having the good linearity and repeatability, and low hysteresis.
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