Abstract
This chapter deals with the design, fabrication, packaging, and instrumentation of ISFET and EGFET devices as pH-sensing platforms for chemical and biological sensors. The ISFETs have been developed in two geometrical layouts: a twin-FET configuration on a single chip comprising ISFET and a reference field-effect transistor (REFET); and a single ISFET with linear gate geometry. Packaging challenges have been successfully overcome by thick film alumina and low-temperature cofired ceramic (LTCC) technologies. Characterization studies have been performed on ISFETs. An ISFET-based pH meter, consisting of a sensor probe, a signal conditioning circuit, microcontroller, and display has been developed. The study has been carried out on a pH-sensitive extended gate electrode with a Ta2O5 sensing film by connecting it to a standard MOSFET gate to develop an EGFET device.
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