Design and development of Fabry–Perot etalon based color filter using ebeam GLAD technique: Simulation and experiment

Abstract

The design of Spatial Variable Color Filter (SVCF), based on the principle of Fabry–Perot (FP) etalon, has been analyzed in detail considering Ag as reflecting metallic layer and TiO2 as cavity layer. The effect of different thickness ranges of cavity layer for different order of interference peaks and the effect of varying thickness of reflecting layer has been investigated through simulation. A SVCF has been designed in the broad visible wavelength range of 464 to 670 nm based on the 2nd order interference peak of FP etalon for optimized spectral performance and it has been experimentally demonstrated using ebeam evaporation technique. The reflecting Ag layer has been deposited at normal angle and the tapered cavity layer of TiO2 has been deposited at 86° glancing angle. The distribution of thickness and dispersion relationship at various locations of the glancing angle deposited (GLAD) TiO2 thin films has been analyzed by spectroscopic ellipsometry measurements. The effect of lateral variation of dispersion properties of cavity layer caused by GLAD, on the spectral performance of the developed SVCF, has been investigated by both simulation and through spectral transmittance measurement. Overall results demonstrate the potential of the axial glancing angle deposition technique for the first time for development of SVCF in visible wavelength with high peak transmittance (∼67%) and a peak wavelength tunability of ∼4 nm/mm.