Abstract
This paper presents the design and development of a new flexure-based compliant XY micropositioning stage with large stroke. The parallel-kinematic XY compliant stage is designed based on the Roberts mechanisms. Pseudo-rigid-body model is developed to establish the quantitative models of the whole compliant mechanism. Finite element analysis is carried out to validate the performance of the XY stage. A prototype of the XY stage is developed for experimental investigations. Experimental results show that the stage can deliver a working range larger than 12 mm in each of the two working axes. Moreover, a feedback control using the proportional–integral–derivative control algorithm is implemented to demonstrate the positioning performance of the developed XY stage. The reported ideas can also be extended to the design and control of other micro-/nanopositioning systems.
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Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
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