Design and Development of a 3-axis Micro Gyroscope with Vibratory Ring Springs

Abstract

This work presents the design, simulation and experiment of a miniaturized 3-axis gyroscope with vibratory ring springs. Its total size is 2mmx2 mm. The designed gyroscope has the vibrating ring spring to accomplish all sensing schemes necessary for 3-axis angular rate. The gyroscope is composed of the inner and outer ring springs, the x- direction and y-direction driving parts, the rolling sensing, and the pitch sensing and the yaw sensing parts. FEA analysis was performed to get the driving mode and the sensing mode using ANSYS program. The gyroscope was fabricated by using SOI process. The resonance frequencies of the fabricated gyroscope are respectively 16.9 kHz for the driving mode, 17.04 kHz for the yaw sensing mode, and 16.47 kHz for the pitch and rolling sensing modes. The frequency difference for the mode matching sensing is within 0.1% and it is in the controllable range. The resonance Q factors are 720 for the driving mode, 4370 for the pitch and roll sensing mode and 3922 for the yaw sensing mode, respectively.