Abstract
A high resolution, passive, bulk-micromachined accelerometer based on the transmission-type intrinsic Fabry-Perot interferometer has been designed, fabricated and, for the first time, experimentally evaluated via direct inertial characterization. The device characterization includes frequency- and time-domain evaluation. The sensor characteristics of bandwidth, range, sensitivity, and resolution are obtained experimentally and the tradeoffs between these performance parameters are examined. Also, presented is the evaluation of the effects of the excitation of multiple vibration modes in such a sensor. The sensor performance is observed to have a resolution limits below a mug with a demonstrated 30 mug resolution over a sensing bandwidth greater than 2 kHz and better than 1 dynamic range.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
