Design and control of a single-stage dual-actuator system for high-precision manufacturing

Abstract

This paper proposes a design for the linear state feedback control of the dual-actuator system, which is a dual-input single-output system for the high-precision manufacturing stage. The proposed control prevents saturation or reduces the unnecessary movement of the piezoelectric (PZT) actuator at the transient response by tracking the error between the estimated and actual positions of the coarse-actuator system at each control sample. Also, a new mechanism of the single-stage dual actuator is introduced. The axes of the stepper motor and the PZT actuator are co-axial. The coupling effects between the stepper motor and the PZT actuator are considered. Both the simulation and experiment results show that the proposed algorithm successfully prevents unwanted motions of the PZT actuator at the transient response. The experiment results show that the settling time and overshoot were enhanced by 45.7 and 95.9 %, respectively, for the proposed algorithm when the reference distance was 10 μm, which exceeds the stroke of the PZT actuator.