Abstract
A piezoelectric-driven microgripper with three-stage amplification was designed, which is able to perceive the tip displacement and gripping force. The key structure parameters of the microgripper were determined by finite element optimization and its theoretical amplification ratio was derived. The tracking experiments of the tip displacement and gripping force were conducted with a PID controller. It is shown that the standard deviation of tracking error of the tip displacement is less than 0.2 μm and the gripping force is 0.35 mN under a closed-loop control. It would provide some references for realizing high-precision microassembly tasks with the designed microgripper which can control the displacement and gripping force accurately.
Highlights
With the rapid development of micro-electromechanical systems (MEMS), microassembly and micromanipulation as the key technologies have become a hot research topic at home and abroad gradually [1]
We can see that the maximal maximal output displacement of microgripper was approximately 102.3 μm, and the corresponding input displacement was 6.1 μm, microgripper was approximately 102.3 μm, and the corresponding input displacement was 6.1 μm, so the ratio of of thethe microgripper canalso alsobe befound found from so amplification the amplification ratio microgrippercan canbe bederived, derived, as as 16.8
A three-stage amplificationmicrogripper microgripper based on compliant the compliant mechanism
Summary
With the rapid development of micro-electromechanical systems (MEMS), microassembly and micromanipulation as the key technologies have become a hot research topic at home and abroad gradually [1]. In many micro‐operation tasks, due to the irregular shape of some objects manipulated, the gripper tips and the micro‐objects have a tendency to slip, which affects the efficiency and precision. The maximum output displacement is 150 μm and the corresponding amplification the tip displacement and the gripping force precisely because the objects manipulated are small and ratio is 16. Many micro-operation tasks, duestrain to the irregular shape of some objects gripper the tip displacement themicro-objects gripping force to the properties of high resolution, simple of mechanism, tips and and the have adue tendency to slip, which affects the efficiency and precision the micro-operation process, and makes the control of the microgripper more complicated. It is necessary to regulate both the tip displacement and the gripping force precisely because the objects manipulated are small and can be readily damaged
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