Design and Control of a Dual-Stage Actuation Active Vibration Isolation System

Bo Zhao,Jiubin Tan,Weijia Shi

doi:10.1109/access.2019.2941712

Abstract

Active vibration isolation system is used in various fields to reduce the vibrations transmitted. In this paper, a novel dual-stage actuator is proposed, which combines a voice coil motor and a piezoelectric actuator. The proposed dual-stage actuator maintains the advantages, in terms of the long stroke, the high precision, and the wide band. The dual-stage actuation active vibration isolation system (DSA-AVIS) with the proposed dual-stage actuator is initially modeled. The characteristic of the DSA-AVIS is subsequently analyzed. H ∞ controller is finally designed to consider the vibration isolation performance and the output range of the actuators. The experimental results indicate that the closed-loop transmissibility of the DSA-AVIS is less than -18 dB from 0 to 100 Hertz.

Highlights

Vibration isolation has been of great interest in the academic and industrial areas of lithography machines [1], high-precision measuring instruments [2], [3], automobiles [4], [5], aerospace [6], [7], civil structures [8], and floating raft [9], [10]
The active vibration isolation system (AVIS) is of higher cost but it can perform better than passive vibration isolation system
The proposed dual-stage actuator is applied to an AVIS to achieve the wide band and the high-performance vibration isolation

Summary

INTRODUCTION

Vibration isolation has been of great interest in the academic and industrial areas of lithography machines [1], high-precision measuring instruments [2], [3], automobiles [4], [5], aerospace [6], [7], civil structures [8], and floating raft [9], [10]. The proposed dual-stage actuator is applied to an AVIS to achieve the wide band and the high-performance vibration isolation. The dual-stage actuation active vibration isolation system (DSA-AVIS) is initially proposed and mathematically modeled. The VCM has long motion stroke with zero stiffness It only works in low frequency band and its resolution is not high enough for micro vibration isolation. The dual-stage actuator combines the advantages of them and obtains wide control frequency band, high resolution and long motion stroke in the active vibration isolation system. The design of the weight functions of an H-inf controller can guarantee that the DSA-AVIS maintain different gains within different bandwidth, which can effectively eliminate the resonance peaks with lowest conservative performance. The feedback matrix K is obtained by calculating an H-inf norm

EXPERIMENTAL VERIFICATIONS

Findings

CONCLUSION