Abstract

This article presents a high-acceleration rotary bond head to improve the efficiency and precision of thermosonic bonding. The bond head is direct driven by a rotary voice coil actuator, and needle roller bearings are adopted as the rotary connection parts. Using the finite-element analysis and experiment tests, the dynamic characteristics of the bond head were investigated. The results indicate that the vibrations of the bond head have negative influences on the bonding process and the ultrasonic transducer system. They can reduce the efficiency of the ultrasonic energy transmission and even result in the bonder working abnormally. To avoid these vibration modes, high-frequency harmonic components of the driving signals were eliminated by adding a notch filter to the control system. Considering the remnant vibrations during high-frequency starts and stops, friction compensation and proportion integration differentiation (PID) feedback control with anti-windup correction were adopted. The controller was designed and co-simulated by using MATLAB and MSC.ADAMS software. The co-simulation and experiment results show that the bond head provides for good performances.

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