Design and control issues for a hybrid linear motor working on self-moving cell concept

Abstract

This paper presents the development of a hybrid linear motor that operates based on self-moving cell concept. The working principle is far different from the conventional linear inchworm motor. The new linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting there cells and the train is fitted into a guideway with interference. By activating each cell in succession, the train moves along the guideway. Keys to realization of this goal are the design and control of moving cell, and these issues are addressed. One of the merits of this motor is that it can move by macro motion and micro motion. In macro motion, the cell train can move fast by activating each cell in succession. In micro motion, in contract, the first cell can move in nano scale by adjusting the activating voltage for the cell. The moving performance of the motor is demonstrated. As results the maximum speed of 70μm/s with the resolution of 20nm were achieved. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.