Abstract
Abstract The Surface Acoustic Wave (SAW) temperature sensor has received significant attention due to its wirelessly-powered, battery-free, and chipless capabilities. This paper proposes a wireless sensing system comprising a one-port SAW resonator, antennas, and transceiver circuit. The SAW resonator utilized in this system was based on Aluminum Nitride (AlN) thin film, which exhibits high SAW velocity and excellent piezoelectric properties. To completely investigate the performance of the SAW resonator, simulation and experiments were conducted. Upon connecting the SAW sensor to the temperature sensing system via the antenna, the reflection peak of the SAW resonator was clearly observed in the spectrum of the return signal. Additionally, during the temperature tests, the response frequency displayed almost linear behavior as the temperature increased from 30°C to 150°C. The fitted temperature coefficient of frequency (TCF) was 30.68ppm/°C, indicating that the wireless temperature sensing system has high temperature sensitivity.
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