Abstract
In this study, a PVDF thin film with one layer is designed for a 3-axis force sensor. In the process of stretching, appropriate stretching ratio and oven temperature for heating PVDF to make film thin enough and with large fraction of β phase is imperative to ensure the subsequent poling successfully. To achieve the desired function, special electrode pattern design of polarization along the thickness and horizontal-side direction is introduced. Several important characteristics of piezoelectricity are investigated by use of FTIR, XRD, and PFM. Frequency response and input/output sensitivity response as well as piezoelectric coefficient d33 of the proposed PVDF sensor are measured for performance evaluation.
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