Abstract
A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68A/Wat 1.55-μm without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large −1 dB vertical alignment tolerance of 2.5 μm are achieved.
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