Abstract
This paper presents the design, simulation, and analysis of different 3D-shapes of scanning near-field optical microscopy probes, allowing the acquisition of both topographic and optical images. The study is conducted using COMSOL and ANSYS simulation tools to study the probe sensitivity and deflection. The simulation calculations of deflection and von Mises stress are denoted, analyzed, and compared based on the change in the probe shapes for the same applied force. The results obtained from the two finite element tools were similar, converged to the same ideal design, and showed the impact of the probe structure on the probe performance.
Highlights
Most commercial probes used in scanning near-field optical microscopy (SNOM) are based on tapered optical fibers and can work in emission and collection modes [1]
The results obtained in COMSOL and ANSYS are compared to validate the study and to choose the best design that prompts the greatest cantilever probe flexibility
The cantilever probe behavior can be explained by Equations (1) and (2), which indicate that the cantilever deflection δ is directly proportional to the applied stress σ and depends on the force applied F, cantilever spring constant κ, cantilever probe dimensions and probe material properties (Poisson ratio θ, Young modulus E)
Summary
Most commercial probes used in scanning near-field optical microscopy (SNOM) are based on tapered optical fibers and can work in emission and collection modes [1]. In the four probe models presented above, the cantilever thickness t and tip apex aperture corresponded to 4 μm and 50 nm, respectively. Model 1 probe sensor consists of a rectangular box cantilever shape of width 28.28μm with a tip attached to its free end having the same width and a 20μm height.
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